Silicon Rod Piece Measuring System

Monocrystalline silicon rod pieces are needed for wafer production. Before processing and for follow-up quality control, these rod pieces are measured. The rods are identified by means of a barcode. The diameter is determined with a blue LED light curtain and a corresponding CCD measuring field. Other geometric features are measured with lasers, their position and orientation are recorded with high-precision length and angle measurement systems.

The controlling of the plant is realised with the ALPHA-VISION®-SoftPLC; the operation with the process control system ALPHA-VISION®-VISUalisation.
The evaluation of the recorded measurement data takes place directly online. Here, the easy integration of mathematical algorithms into the SoftPLC is of advantage.

An interface to the company-wide intranet was created for the storage and further processing of the key data.